JPS62134232U - - Google Patents
Info
- Publication number
- JPS62134232U JPS62134232U JP1894186U JP1894186U JPS62134232U JP S62134232 U JPS62134232 U JP S62134232U JP 1894186 U JP1894186 U JP 1894186U JP 1894186 U JP1894186 U JP 1894186U JP S62134232 U JPS62134232 U JP S62134232U
- Authority
- JP
- Japan
- Prior art keywords
- control device
- gas flow
- holding
- buffer plate
- flow control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1894186U JPS62134232U (en]) | 1986-02-14 | 1986-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1894186U JPS62134232U (en]) | 1986-02-14 | 1986-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62134232U true JPS62134232U (en]) | 1987-08-24 |
Family
ID=30813080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1894186U Pending JPS62134232U (en]) | 1986-02-14 | 1986-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62134232U (en]) |
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1986
- 1986-02-14 JP JP1894186U patent/JPS62134232U/ja active Pending